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Hybrid Turbomolecular Pumps - ATH series- adixen by Alcatel Vacuum Technology |
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See also Molecular drag pumps MDP
ATH
31 Exceptional performance
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This
mass spectrometer includes
two ATH 31 (integrated nude version) and two miniboard controllers.
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ATH
31 The ATH 31 includes one turbo stage and one Holweck stage. With excellent compression ratios and a backing pressure tolerance of up to 25 mbar, it can be backed by a membrane pump. It features one intermediate pumping port. |
ATH
31+ The ATH 31+, with one turbo stage and three Holweck stages, offers outstanding compression ratios. It is the ideal version for pumping light gases. Its exceptional performance can be achieved with a membrane pump as a fore. |
ATH
31 C The ATH 31 C includes one turbo stage, and two Holweck stages. A purge offers protection against corrosive gases. It can be backed by a membrane pump. It features one intermediate pumping port. |
ADVANTAGES •
Additional pumping capacity, |
ROBUSTNESS •
Unexpected air inrushes, |
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For
more information please e-mail us with your request |
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